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Environmental scanning electron microscope with tungsten cathode as an electron source (electron beam generation by heat emission).
The microscope is called "environmental" or "ESEM" because it allows work at different pressures and at 100% humidity. By adjusting the pressure in the chamber, we obtain the conditions for observing different samples.
Basic technical characteristics:
With the Quanta 200 3D electron microscope, three basic modes of operation are possible:
In the »ESEM« mode we can observe all types of samples (polymeric materials, ceramics, non-conductive surface layers, biological and medical samples,…), but it is especially important for the observation of wet, greasy and dirty samples, and for the observation of in-situ processes (hydration, dissolution…).
Due to different operating conditions, there are several different detectors in the microscope:
The standard equipment of the Quanta 200 3D microscope is an ion beam gun - FIB (Focused Ion Beam), with which we obtain a focused beam of primary gallium ions. The diameter of the ion beam is very small - (eg 6 nm at a current of 1 pA) and due to the high density of ions allows for a good contrast image.
The basic tasks of an ion beam are:
It also provides a high-resolution electron image (by capturing secondary electrons caused by the ion beam). With the ion beam we can process all types of samples (very hard - diamond, metals, ceramics, as well as polymers, medical and biological samples).
The etching rate depends on the sample and the ion flux (Quanta 200 3D has 12 levels - from 1pA to 20 nA).
Electron microscopes have only recently been equipped with ion guns. The applicability of the ion gun in various fields is still the subject of intensive research. It definitely allows us to look below the surface of the sample. The surface is moderately contaminated with Ga ions, which must be taken into account in the microchemical analysis.
Non-standard equipment on the Quanta 200 3D microscope is a platinum deposition system. Platinum deposition has different purposes: